As the basic technology of precision machinery, submicron technology has been developed under the promotion of some important industrial sectors. For example, when the parabolic reflector of a large astronomical telescope is directly turned with a diamond turning tool, it is required to machine a surface whose geometric accuracy is higher than 1/10 of the wavelength of light wave, that is, the geometric shape error is less than 0.05 μ m or 2 μ h. The production of LSI and the development of V...